Heating regimes observed in capacitive RF driven discharges

Autoria(s): Mahony, C.M.O.; Steen, Philip; McFarland, J.; Graham, William
Data(s)

01/07/1999
Identificador

http://pure.qub.ac.uk/portal/en/publications/heating-regimes-observed-in-capacitive-rf-driven-discharges(efd14ff4-9382-4022-b113-415ec839b371).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Mahony , C M O , Steen , P , McFarland , J & Graham , W 1999 , ' Heating regimes observed in capacitive RF driven discharges ' Paper presented at 24th International Conference on Phenomena in Ionized Gases , Warsaw , Poland , 01/07/1999 - 01/07/1999 , pp. 25-26 .
Tipo

conferenceObject
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