External circuit system effects on chlorine plasma instabilities
| Data(s) |
28/04/2005
|
|---|---|
| Resumo |
The effects of the external circuit on plasma instabilities in all inductive plasma source are investigated. The instabilities are found to be asymmetric with respect to the circuit input impedance. A simplified model of the antenna-plasnia coupling provides an explanation of the asymetry. |
| Identificador |
http://dx.doi.org/10.1049/el:20050424 http://www.scopus.com/inward/record.url?scp=18744410396&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Ellingboe , A R , Law , V J , Soberon , E , Garcia , F & Graham , W 2005 , ' External circuit system effects on chlorine plasma instabilities ' Electronics Letters , vol 41 , no. 9 , pp. 525-526 . DOI: 10.1049/el:20050424 |
| Palavras-Chave | #/dk/atira/pure/subjectarea/asjc/2200/2208 #Electrical and Electronic Engineering |
| Tipo |
article |
