Conduction mechanism in high-k ZrO2 gate dielectric films on strained-Ge layers
Data(s) |
01/12/2003
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Identificador | |
Idioma(s) |
eng |
Direitos |
info:eu-repo/semantics/restrictedAccess |
Fonte |
Armstrong , M & Gamble , H 2003 , ' Conduction mechanism in high-k ZrO2 gate dielectric films on strained-Ge layers ' Paper presented at 2003 Intl Semiconductor Device Research Symp (IEEE Cat. No.03EX741), pp 29-30 , Washington , United States , 01/12/2003 - 01/12/2003 , pp. 29-30 . |
Tipo |
conferenceObject |