Composition and stress analysis in Si structures using micro-Raman spectroscopy
| Data(s) |
01/04/2004
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|---|---|
| Identificador |
http://www.scopus.com/inward/record.url?scp=6344247467&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Armstrong , M & Gamble , H 2004 , ' Composition and stress analysis in Si structures using micro-Raman spectroscopy ' Paper presented at SPIE Photonics Europe, Optical Micro- & Nanometrology in Manufacturing Technology , Paris , France , 01/04/2004 - 01/04/2004 , pp. 0-0 . |
| Tipo |
conferenceObject |
