Electrical characterisation of SOI substrates incorporating WSix ground planes
| Data(s) |
01/04/2004
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|---|---|
| Identificador | |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Armstrong , M , Bain , M , Baine , P , Gamble , H & McNeill , D 2004 , ' Electrical characterisation of SOI substrates incorporating WSix ground planes ' Paper presented at NATO Advanced Research Workshop: Science & Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment , Kiev , Ukraine , 01/04/2004 - 01/04/2004 , pp. 0-0 . |
| Tipo |
conferenceObject |
