Laser-annealing of sputtered silicon for wafer bonding applications

Autoria(s): Armstrong, Mervyn; Gamble, Harold; Hurley, Richard
Data(s)

01/09/2004
Identificador

http://pure.qub.ac.uk/portal/en/publications/laserannealing-of-sputtered-silicon-for-wafer-bonding-applications(d20c45b2-6318-4726-99b8-d7c56c322a39).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Armstrong , M , Gamble , H & Hurley , R 2004 , ' Laser-annealing of sputtered silicon for wafer bonding applications ' Paper presented at 10th Joint Vacuum Conf , Portoroz , Slovenia , 01/09/2004 - 01/09/2004 , pp. 0-0 .
Tipo

conferenceObject
Acesso ao item digital