Composition and stress analysis in Si structures using micro-raman spectroscopy
| Data(s) |
01/09/2004
|
|---|---|
| Identificador |
http://www.scopus.com/inward/record.url?scp=6344247467&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Armstrong , M & Gamble , H 2004 , ' Composition and stress analysis in Si structures using micro-raman spectroscopy ' Scanning , vol 25(5) , no. 5 , pp. 235-239 . |
| Palavras-Chave | #/dk/atira/pure/subjectarea/asjc/3100/3105 #Instrumentation |
| Tipo |
article |
