Selective depostion of CVD iron on SiO2 and tungsten

Autoria(s): Armstrong, Mervyn; Bain, Michael; Bien, Daniel; Montgomery, John; Gamble, Harold
Data(s)

01/03/2006
Identificador

http://pure.qub.ac.uk/portal/en/publications/selective-depostion-of-cvd-iron-on-sio2-and-tungsten(1956d173-0026-4949-ba56-7798b5804afd).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Armstrong , M , Bain , M , Bien , D , Montgomery , J & Gamble , H 2006 , ' Selective depostion of CVD iron on SiO2 and tungsten ' Paper presented at Materials for Advanced Metallization (MAM 2006) , Grenoble , France , 01/03/2006 - 01/03/2006 , pp. 0-0 .
Tipo

conferenceObject
Acesso ao item digital