Investigation into the selectivity of CVD iron from Fe(CO)5 precursor on various metal and dielectric patterned substrates

Autoria(s): Armstrong, Mervyn; Bain, Michael; Gamble, Harold; Low, Yee; Montgomery, John
Data(s)

25/09/2007
Identificador

http://pure.qub.ac.uk/portal/en/publications/investigation-into-the-selectivity-of-cvd-iron-from-feco5-precursor-on-various-metal-and-dielectric-patterned-substrates(575fdae7-f0d8-4fa6-bcf1-26cd1f413e77).html

http://www.scopus.com/inward/record.url?scp=34547665548&partnerID=8YFLogxK
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Armstrong , M , Bain , M , Gamble , H , Low , Y & Montgomery , J 2007 , ' Investigation into the selectivity of CVD iron from Fe(CO)5 precursor on various metal and dielectric patterned substrates ' Surface and Coatings Technology , vol 201(21-23) , no. 22-23 SPEC. ISS. , pp. 8998-9002 .
Palavras-Chave #/dk/atira/pure/subjectarea/asjc/2500/2508 #Surfaces, Coatings and Films #/dk/atira/pure/subjectarea/asjc/3100/3104 #Condensed Matter Physics #/dk/atira/pure/subjectarea/asjc/3100/3110 #Surfaces and Interfaces
Tipo

article
Acesso ao item digital