Porous Silicon as a sacrificial layer in Production of Silicon Diaphragms by Precision Grinding

Autoria(s): Prochaska, A.; Mitchell, Neil; Gamble, Harold
Contribuinte(s)

Tay, Francis E.H.
Data(s)

01/08/2002
Identificador

http://pure.qub.ac.uk/portal/en/publications/porous-silicon-as-a-sacrificial-layer-in-production-of-silicon-diaphragms-by-precision-grinding(49d8db15-e4a5-4c4d-b66f-61d6593086c5).html
Idioma(s)

eng
Publicador

Springer
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Prochaska , A , Mitchell , N & Gamble , H 2002 , Porous Silicon as a sacrificial layer in Production of Silicon Diaphragms by Precision Grinding . in F E H Tay (ed.) , Materials & Process Integration for MEMS . Springer , pp. 27-50 , International MEMS Workshop , Singapore , Singapore , 1-1 July .
Tipo

contributionToPeriodical
Acesso ao item digital