Transfer of Stacked SiO2/Poly Si Membrane For Microchannels

Autoria(s): Zhou, Hao; Rainey, Paul; Mitchell, Neil; Gamble, Harold
Data(s)

01/10/2002
Identificador

http://pure.qub.ac.uk/portal/en/publications/transfer-of-stacked-sio2poly-si-membrane-for-microchannels(92bf3309-14f2-4c83-8739-6bb01415f714).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Zhou , H , Rainey , P , Mitchell , N & Gamble , H 2002 , ' Transfer of Stacked SiO2/Poly Si Membrane For Microchannels ' Paper presented at Micromechanics Europe Workshop MME 2002 , Sinaia , Romania , 01/10/2002 - 01/10/2002 , pp. 43-46 .
Tipo

conferenceObject
Acesso ao item digital