Boron Etch-Stop for MEMS Applications

Autoria(s): Rainey, Paul; Zhou, Hao; Mitchell, Neil; Gamble, Harold
Data(s)

01/10/2002
Identificador

http://pure.qub.ac.uk/portal/en/publications/boron-etchstop-for-mems-applications(4f202ed7-b027-44b6-a5b3-84df08d73b7a).html
Idioma(s)

eng
Direitos

info:eu-repo/semantics/restrictedAccess
Fonte

Rainey , P , Zhou , H , Mitchell , N & Gamble , H 2002 , ' Boron Etch-Stop for MEMS Applications ' Paper presented at Micromechanics Europe Workshop MME 2002 , Sinaia , Romania , 01/10/2002 - 01/10/2002 , pp. 75-78 .
Tipo

conferenceObject
Acesso ao item digital