Study of dislocations and stress in silicon-on-insulator tubs using transmission electron microscopy and finite element modelling
| Data(s) |
01/04/2003
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| Identificador |
http://www.scopus.com/inward/record.url?scp=3042781021&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
McMullan , A J , O'Mahoney , D , Nevin , W A , Paxton , A & Gregg , M 2003 , ' Study of dislocations and stress in silicon-on-insulator tubs using transmission electron microscopy and finite element modelling ' Paper presented at 7th International Symposium on Semiconductor Wafer Bonding , Paris , France , 01/04/2003 - 01/04/2003 , pp. 39-48 . |
| Tipo |
conferenceObject |
