Instabilities in an inductively coupled oxygen plasma


Autoria(s): Corr, C.S.; Steen, P.G.; Graham, William
Data(s)

01/05/2003

Identificador

http://pure.qub.ac.uk/portal/en/publications/instabilities-in-an-inductively-coupled-oxygen-plasma(df457bda-75ea-428b-9554-89cf48b53eee).html

http://www.scopus.com/inward/record.url?scp=0038283094&partnerID=8YFLogxK

Idioma(s)

eng

Direitos

info:eu-repo/semantics/restrictedAccess

Fonte

Corr , C S , Steen , P G & Graham , W 2003 , ' Instabilities in an inductively coupled oxygen plasma ' Plasma Sources Science & Technology , vol 12 , no. 2 , pp. 265-272 .

Palavras-Chave #/dk/atira/pure/subjectarea/asjc/3100 #Physics and Astronomy(all) #/dk/atira/pure/subjectarea/asjc/3100/3104 #Condensed Matter Physics
Tipo

article