Chlorine plasma system instabilities within an ICP tool driven at a frequency of 13.56 MHz
| Data(s) |
01/05/2006
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|---|---|
| Identificador |
http://www.scopus.com/inward/record.url?scp=33646375689&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Soberon , F , Garcia- Marro , F , Graham , W , Ellingboe , A R & Law , V J 2006 , ' Chlorine plasma system instabilities within an ICP tool driven at a frequency of 13.56 MHz ' Plasma Sources Science & Technology , vol 15 , no. 2 , pp. 193-203 . |
| Palavras-Chave | #/dk/atira/pure/subjectarea/asjc/3100 #Physics and Astronomy(all) #/dk/atira/pure/subjectarea/asjc/3100/3104 #Condensed Matter Physics |
| Tipo |
article |
