Conformal oxide coating of carbon nanotubes
Data(s) |
01/02/2008
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Resumo |
The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. Here, we demonstrate the possibility of conformally coating carbon nanotubes with high-dielectric oxide as a first step toward ultrahigh integration density of three-dimensional ferroelectric random access memories. |
Identificador |
http://dx.doi.org/10.1063/1.2841710 http://www.scopus.com/inward/record.url?scp=38949101146&partnerID=8YFLogxK |
Idioma(s) |
eng |
Direitos |
info:eu-repo/semantics/restrictedAccess |
Fonte |
Kawasaki , S , Catalan , G , Fan , H J , Saad , M M , Gregg , M , Correa-Duarte , M A , Rybczynski , J , Morrison , F D , Tatsuta , T , Tsuji , O & Scott , J F 2008 , ' Conformal oxide coating of carbon nanotubes ' Applied Physics Letters , vol 92 , no. 5 , 053109 , pp. 053109-053109 . DOI: 10.1063/1.2841710 |
Palavras-Chave | #/dk/atira/pure/subjectarea/asjc/3100/3101 #Physics and Astronomy (miscellaneous) |
Tipo |
article |