Characteristics of single crystal "thin film" capacitor structures made using a focused ion beam microscope


Autoria(s): Saad, Mohamed; Bowman, Robert; Gregg, Marty
Data(s)

16/02/2004

Identificador

http://pure.qub.ac.uk/portal/en/publications/characteristics-of-single-crystal-thin-film-capacitor-structures-made-using-a-focused-ion-beam-microscope(05607537-5da3-4481-a9c8-1cb9ebbc504c).html

http://dx.doi.org/10.1063/1.1645318

http://www.scopus.com/inward/record.url?scp=1542784196&partnerID=8YFLogxK

Idioma(s)

eng

Direitos

info:eu-repo/semantics/restrictedAccess

Fonte

Saad , M , Bowman , R & Gregg , M 2004 , ' Characteristics of single crystal "thin film" capacitor structures made using a focused ion beam microscope ' Applied Physics Letters , vol 84 , no. 7 , pp. 1159-1161 . DOI: 10.1063/1.1645318

Palavras-Chave #/dk/atira/pure/subjectarea/asjc/3100/3101 #Physics and Astronomy (miscellaneous)
Tipo

article