Low Temperature Bonding of PECVD Silicon Dioxide Layers
| Data(s) |
01/11/2006
|
|---|---|
| Identificador |
http://www.scopus.com/inward/record.url?scp=34249073156&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Baine , P , Bain , M , McNeill , D , Gamble , H & Armstrong , M 2006 , ' Low Temperature Bonding of PECVD Silicon Dioxide Layers ' ECS Transactions , vol 3(6) , no. 6 , pp. 165-173 . |
| Tipo |
article |
| Palavras-Chave | #/dk/atira/pure/subjectarea/asjc/2200 #Engineering(all) |
