Defect production during ion-assisted deposition of molybdenum films studied by Molecular Dynamics
| Data(s) |
1999
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|---|---|
| Identificador |
http://www.scopus.com/inward/record.url?scp=0032652197&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Klaver , P & Thijsse , B J 1999 , ' Defect production during ion-assisted deposition of molybdenum films studied by Molecular Dynamics ' Paper presented at Materials Research Society Fall meeting , Boston , United States , 01/01/1999 - 01/01/1999 , pp. 51 . |
| Tipo |
conferenceObject |
