Atomic-scale effects of sub-keV ions during growth and subsequent ion-beam analysis of molybdenum thin films


Autoria(s): Klaver, Peter; Haddeman, E.F.C.; Thijsse, B.J.
Data(s)

1999

Identificador

http://pure.qub.ac.uk/portal/en/publications/atomicscale-effects-of-subkev-ions-during-growth-and-subsequent-ionbeam-analysis-of-molybdenum-thin-films(e11fe233-34a2-4154-9b44-7ae31b529751).html

Idioma(s)

eng

Direitos

info:eu-repo/semantics/restrictedAccess

Fonte

Klaver , P , Haddeman , E F C & Thijsse , B J 1999 , ' Atomic-scale effects of sub-keV ions during growth and subsequent ion-beam analysis of molybdenum thin films ' Nuclear Instruments & Methods in Physics Research - Section B: Beam Interactions with Materials and Atoms , vol 153 , pp. 228 .

Tipo

article