Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias
| Data(s) |
01/04/2005
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|---|---|
| Identificador | |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Bain , M , Baine , P , McNeill , D , Srinivasan , G , Jankovic , N , McCartney , J , Moore , R A , Armstrong , M & Gamble , H 2005 , ' Fabrication and characterisation of silicon on insulator substrates incorporating thermal vias ' Paper presented at NATO Advanced Research Workshop: Science and Technology of Semiconductor-On-Insulator structures devices operating in a harsh environment , Kyiv , Ukraine , 01/04/2004 - 01/04/2004 , pp. 103-108 . |
| Tipo |
conferenceObject |
