Optimization of conductivity monitoring in micromachined silicon capillaries
| Data(s) |
01/07/2002
|
|---|---|
| Identificador |
http://dx.doi.org/10.1117/1.1479708 http://www.scopus.com/inward/record.url?scp=70449890995&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Rainey , P , Mitchell , N & Gamble , H 2002 , ' Optimization of conductivity monitoring in micromachined silicon capillaries ' SPIE Journal of Microlithography, Microfabrication, and Microsystems , vol 1(2) , no. 2 , pp. 159-165 . DOI: 10.1117/1.1479708 |
| Palavras-Chave | #/dk/atira/pure/subjectarea/asjc/2200/2208 #Electrical and Electronic Engineering #/dk/atira/pure/subjectarea/asjc/2200/2210 #Mechanical Engineering #/dk/atira/pure/subjectarea/asjc/2500/2504 #Electronic, Optical and Magnetic Materials #/dk/atira/pure/subjectarea/asjc/3100/3104 #Condensed Matter Physics #/dk/atira/pure/subjectarea/asjc/3100/3107 #Atomic and Molecular Physics, and Optics |
| Tipo |
article |
