Characterisation of masking materials for deep glass micromachining
| Data(s) |
01/07/2003
|
|---|---|
| Identificador |
http://dx.doi.org/10.1088/0960-1317/13/4/305 http://www.scopus.com/inward/record.url?scp=0037765123&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Bien , D , Rainey , P , Mitchell , N & Gamble , H 2003 , ' Characterisation of masking materials for deep glass micromachining ' Journal of Micromechanics and Microengineering , vol 13(4) , no. 4 , pp. S34-S40 . DOI: 10.1088/0960-1317/13/4/305 |
| Palavras-Chave | #/dk/atira/pure/subjectarea/asjc/2200/2206 #Computational Mechanics #/dk/atira/pure/subjectarea/asjc/2200/2211 #Mechanics of Materials #/dk/atira/pure/subjectarea/asjc/2500 #Materials Science(all) #/dk/atira/pure/subjectarea/asjc/3100/3105 #Instrumentation |
| Tipo |
article |
