Silicon-on-insulator substrates with buried tungsten silicide layer
| Data(s) |
01/04/2001
|
|---|---|
| Identificador |
http://dx.doi.org/10.1016/S0038-1101(01)00075-2 http://www.scopus.com/inward/record.url?scp=0035335811&partnerID=8YFLogxK |
| Idioma(s) |
eng |
| Direitos |
info:eu-repo/semantics/restrictedAccess |
| Fonte |
Gamble , H , Armstrong , M , Baine , P , Bain , M & McNeill , D 2001 , ' Silicon-on-insulator substrates with buried tungsten silicide layer ' Solid State Electronics , vol 45(4) , no. 4 , pp. 551-557 . DOI: 10.1016/S0038-1101(01)00075-2 |
| Palavras-Chave | #/dk/atira/pure/subjectarea/asjc/2200/2208 #Electrical and Electronic Engineering #/dk/atira/pure/subjectarea/asjc/2500/2504 #Electronic, Optical and Magnetic Materials #/dk/atira/pure/subjectarea/asjc/3100/3104 #Condensed Matter Physics |
| Tipo |
article |
