Quantitative evaluation of electron beam writing in passivated gold nanoclusters
| Contribuinte(s) |
Institute of Mathematics & Physics (ADT) Mathematics and Physics |
|---|---|
| Data(s) |
09/12/2008
09/12/2008
2001
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| Resumo |
Jenkins, Tudor; Hayton, D.J.; Bedson, T.R.; Palmer, R.E., (2001) 'Quantitative evaluation of electron beam writing in passivated gold nanoclusters', Applied Physics Letters (78) pp.1921-1923 RAE2008 We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. Peer reviewed |
| Formato |
3 |
| Identificador |
Palmer , R E , Bedson , T R , Jenkins , T & Hayton , D J 2001 , ' Quantitative evaluation of electron beam writing in passivated gold nanoclusters ' Applied Physics Letters , vol 78 , no. 13 , pp. 1921-1923 . DOI: 10.1063/1.1354154 0003-6951 PURE: 89135 PURE UUID: f95d1a5f-43c0-454c-8847-ac071c3e93e9 dspace: 2160/1453 |
| Idioma(s) |
eng |
| Relação |
Applied Physics Letters |
| Tipo |
/dk/atira/pure/researchoutput/researchoutputtypes/contributiontojournal/article Article (Journal) |
| Direitos |
