Preparation and characterization of Pd-Ag alloy composite membrane with magnetron sputtering
Data(s) |
01/12/1999
|
---|---|
Resumo |
A Pd-Ag (24 wt%) alloy composite membrane was prepared by the magnetron sputtering. A gamma-Al2O3 membrane was synthesized by the sol-gel method and used as substrate of the Pd-Ag alloy film. The process parameters of the magnetron sputtering were optimized as a function of the compactness of the Pd-Ag alloy film. The best membrane with a thickness of 1 mu m was produced with a sputtering pressure of 2.7 Pa and a substrate temperature of 400 degrees C. The membrane had an H-2/N-2 permselectivity of 51.5-1000 and an H-2 permeation rate of 0.036-1.17 x 10(-5)cm(3)/cm(2).s. Pa, depending on operating conditions. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
赵宏宾 熊国兴 N.Stroh* H.Brunner*.Preparation and characterization of Pd-Ag alloy composite membrane with magnetron sputtering,中国科学(B辑); 1999;42(6):581-588,1999,():- |
Palavras-Chave | #Pd-Ag membrane #Al2O3 membrane #sol-gel #sputtering #H-2 separation |
Tipo |
期刊论文 |