Resolution deterioration in emission electron microscopy due to object roughness
Data(s) |
2000
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Resumo |
In the present paper a general analytic expression has been obtained and confirmed by a computer simulation which links the surface roughness of an object under study in an emission electron microscope and it's resolution. A quantitative derivation was made for the model case when there is a step on the object surface. It was shown that the resolution is deteriorated asymmetrically relative to the step. The effect sets a practical limit to the ultimate lateral resolution obtainable in an emission electron microscope. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
S.A.Nepijko*; N.N.Sedov*; G.Schonhense*;M.Escher*;包信和;韩秀文.Resolution deterioration in emission electron microscopy due to object roughness,Ann.Phys.(Leipzig),2000,6(9):441-451 |
Palavras-Chave | #emission electron microscope (EEM) #resolution #object roughness #computer simulation |
Tipo |
期刊论文 |