海绵卷绕真空磁控溅射镀膜过程中的传动控制

根据磁控溅射中海绵的传动特性,建立了传动控制的数学模型,采用带有矢量的变频调速器实现了海绵卷绕真空镀膜过程中的张力控制,满足了磁控溅射中海绵卷绕的传动要求。

A mathematic model was developed for the transfer motion control of a sponge coil in vacuum magnetron sputtering film coating process,according to the properties of sponge coil during coiling/decoiling operation which rquires no-tension transfer motion.To control the tension of sponge tape during coiling/decoiling,vector frequency converters were used to meet the no-tension requirement.