卷绕式海绵材料真空磁控溅射镀膜设备的研制

本文介绍了海绵卷绕真空磁控溅射镀膜设备的结构及其特点,采用独特的传动机构,靶极结构及控制方式实现了海绵连续卷绕真空磁控溅射镀膜。

Describes the construction and characteristics of the vacuum magnetron sputtering system we developed to doposit metallic thin film on coiled sponge surface,to which the drive system, target and control method were specially designed.