微动机器人的致动机理研究综述

MEMS是当前研究的一个热点,微机器人对于发展MEMS具有重要意义,也是MEMS的一项不可缺少的内容。微动技术是机器人学理论的一个重要分支,也是发展微机器人及相关微技术的基础。目前,各种新型微驱动器层出不穷,极大地推动了微机器人技术的发展。对于微动原理进行分析,从本质上弄清微动产生的机理,不仅可以丰富机器人学理论,还有可能使微动技术产生质的飞跃。从这一角度出发,对各种微动原理加以详细分析和比较,以期得出有意义的结论。

MEMS is a hot point in current studies.Microrobot possesses significant sense to the development of MEMS,and also in an indispensable content of MEMS.Jogging technology is an important branch of robotics theory,and also a foundation for the development of microrobot and related microtechnology.At present,various kinds of new typed microdrivers are emerging one after another,thus the development of microrobot technique has been greatly pushed forward.To carry out analysis upon jogging principle and make clear the generative mechanism of jogging form its essence could not only enrich the theory of robotics but also let the jogging technology be able to produce a leap in nature.Start from this point of view,various kinds of jogging principles are being analyzed and compared in detail in order to obtain a conclusion of significance.

中国科学院沈阳自动化研究所创新基金资助项目(F020110)