原子力显微镜管式扫描器运动学建模与误差分析

针对样本扫描模式原子力显微镜,对其管式扫描器-样本-探针系统进行了运动学分析,建立了该系统的运动学模型,该模型表明:对于给定原子力显微镜扫描器,样本上与探针接触点的横向和纵向位移取决于探针尖端相对于扫描管轴心的偏置量、所加电压(或名义扫描范围)及样本厚度。据此模型,对由于弯曲运动模式所产生的两种重要误差—交叉耦合误差及扫描范围误差进行了定量分析,分析表明:扫描范围误差主要受样本厚度及名义扫描范围影响,而Z向交叉耦合误差主要受探针偏置量及名义扫描范围影响,实验验证了所建立的运动学模型和误差计算公式的正确性;另外,还提出了相应的减小误差的方法。

For sample-scanning atomic force microscope(AFM),the kinematics of tube scanner-sample-probe system is analyzed and the kinematics model is proposed.The model shows that transverse and longitudinal displacement at the point on sample touched by probe tip is dependent on probe tip offset to scanner axes,applied voltage or nominal scanning size and sample thickness.According to the model,two important errors caused by bow motion are quantitatively analyzed,which demonstrates scanning size error greatly affected by sample thickness and nominal scanning size,while Z axis cross-coupling error greatly affected by probe tip offset and nominal scanning size.Experiments verify the kinematics model and error calculation formulas.In addition,some methods are presented to minimize the errors.

国家863计划(2002AA422210)资助项目。