PSD空间定位的非线性误差补偿模型及归一化

PSD是一种高分辨率、实时性好的光电位置敏感器件,因而具有广泛应用的前景.但在光照度变化条件下,输出信号存在非线性飘移,因而影响了作为位置检测传感器的检测精度,尤其在3D测量时适用性受到了限制.针对这个问题,提出了一种PSD位置传感器的非线性误差补偿方法.该方法针对目标的空间距离变化所产生的PSD输出非线性飘移,采用归一化模型进行误差修正,很大程度上改进了PSD的输出一致性,使基于PSD的3D测量系统性能得以提高.

PSD is a kind of photoelectric position-sensitive detector,which has the high resolving power and excellent real time nature.PSD has the abroad application foreground.But in the circumstance of light intensity changing,the output signal exists non-linearity excursion that affects the precision of PSD.The availability of PSD will be limited,especially in the measurement of three-dimension objects.For solving the above problem,we present a new non-linearity error-compensation approach for PSD.Aiming at the output non-linearity excursion caused by objects space distance changing,normalization model has been adopted to amend error.By this mean,the PSD output consistency is improved to some extend and the performance of 3D measurement system based on PSD has been enhanced.