碳纳米管场效应晶体管的自动化装配方法研究

自碳纳米管(Carbon nanotube,CNT)被发明以来,研究者就对CNT所表现出来的优异的物理、化学以及电学特性产生了浓厚的兴趣。近年来,CNT基纳米器件的研究取得了重要进展。特别是利用半导体性CNT制造的碳纳米管场效应晶体管(Carbon nanotube field effect transistor,CNT-FET),在化学传感器以及生物传感器等领域表现出了巨大的应用潜力。为此,本文首先介绍了目前CNT-FET制造方法的研究现状。对基于介电泳(Dielectrophoresis,DEP)的CNT-FET制造方法进行了系统分析,构建了基于DEP方法可实现碳纳米管场效应晶体管的自动化装配的微滴定实验系统。本文进行的CNT-FET装配实验,证明了该系统的有效性。

Since carbon nanotubes (CNTs) were invented,researchers have explained extreme interests about CNTs,due to their unique physical,chemical and electronic characteristics.Recently,CNT-based nano devices have made many progresses.Particularly,carbon nanotube field effect transistor (CNT-FET) fabricated by semiconductor CNT have excellent potential applications in the fields of chemical sensors and biological sensors.Therefore,this paper first makes a review of the methods to assemble CNT-FET.Then,we analyze the method to fabricate CNT-FET using dielectrophoresis (DEP),and develop an automated micro spotting system that is used to assemble CNT-FET.Experiments have demonstrated that it is effective to assemble CNT-FET using this experimental system.