微操作与微装配中微力感知方法的综述

本文介绍了微力感知的各种方法,分析了每种感知方法的基本原理、检测精度及适用范围,并对微装配与微操作中微力传感器的应用作了简要的回顾。在微操作与微装配中,实现可靠的微力感知是目前研究的重要目标之一。本文通过对各种微力感知方法的基本原理进行研究,总结出六大类方法的特点、检测精度以及适宜的使用场合。目的是为从事微力感知研究的学者提供参考,进而促进微装配和微操作的自动化加工技术水平,实现微型装备的可靠、高产量的批量制造。

This paper describes various micro-force sensing methods,analyzes theories,resolution and applied fields of each method,and gives a brief overview about applications of micro-force sensors.In the research on micromanipulation and microassembly,reliable micro-force sensing is quite important.According to the basic theories of various micro-force sensing methods,this paper summarizes features,resolution and proper applied fields of each kind of methods.This paper intends to be helpful for those who commit themselves to micro-force sensing,so that the technology of automating the micro/nano assembly and manipulation will be promoted and the micro devices can be reliably manufactured.

国家自然科学基金(60575050);;国家自然科学基金重点项目(60635040);;国家863计划(2006AA04Z320)资助项目。