碳纳米管探针的制作方法研究

碳纳米管的小直径、高纵横比、高强度和高弹性、优良的耐磨损性能以及独特的电学和化学特性,使其成为高分辨率原子力显微镜的理想探针针尖。本文根据制作工艺的特点,综述现有碳纳米管探针的代表性研究和制作方法:组装式和生长式。组装式是通过手工、电场或磁场的方式将制备好的碳纳米管粘附到常规硅探针的末端;而生长式是在常规硅探针末端或悬臂梁上定点催化生长出一定直径和长度的CNT。最后指出这些方法目前存在的主要问题。

Carbon nanotubes (CNTs) are wildly regarded as ideal probe tips for atomic force microscopy (AFM) to improve the resolution,due to its small size,high aspect ratio,strong mechanical property,high flexibility,unique chemical and electric properties. According to the properties of their procedures,the representative examples of CNT probes are classified into two major methods:an assembling method in which readily available CNTs are manipulated to attach on the tip of conventional silicon probe using manual operation or electromagnetic fields,and a growing method in which CNTs are directly grown from the apex of silicon probe or silicon cantilever beam by a chemical vapor deposition (CVD) process.In conclusion,the limitations of each method are also discussed.

国家自然科学基金资助项目(批准号：60675060);;863项目(批准号：2007AA04Z317)