复杂单臂机器人集束型装备调度模型

针对一类存在并行和可重入腔的复杂单臂机器人集束型装备的调度问题,通过对加工腔、机器人、并行和可重入腔中的各个机器人活动进行分析,推导出对应的时序约束关系,建立了问题的混合整数规划模型,从而获得最优的机器人动作序列和最小周期.调度实例表明了模型的可行性和高效性。

For the scheduling problem of complicated single-blade cluster tools with re-entrant and parallel chambers,the temporal constraints is derived by analyzing robot actions at the process chambers,robot,as well as parallel and re-entrant chambers,and a mixed integer programming model is built to get optimal sequence and minimal cycle time.The validity and efficiency of the proposed model is verified by the scheduling instances.

沈阳市科技计划资助项目(108155-2-00)