Soft lithography and its application

Autoria(s): Wang Zhe,Xing Rubo,Han Yanchun*,Li Binyao
Data(s)

2002
Resumo

软刻蚀是一类基于自组装和复制模塑等原理的非光刻微米和纳米加工方法。
Identificador

http://ir.ciac.jl.cn/handle/322003/17435

http://www.irgrid.ac.cn/handle/1471x/152963
Idioma(s)

中文
Fonte

Wang Zhe,Xing Rubo,Han Yanchun*,Li Binyao.Soft lithography and its application,HUAXUE TONGBAO (CHEMISTRY),2002,(9):606-613
Palavras-Chave #软刻蚀 #微米加工 #纳米加工 #图案化 #弹性模板
Tipo

期刊论文
Acesso ao item digital