Trefoil aberration measurement of lithographic projection optics based on linewidth asymmetry of the aerial image

Autoria(s): Yuan QY(袁琼雁); Wang XZ(王向朝); Qiu ZC(邱自成)
Data(s)

2010
Identificador

http://ir.siom.ac.cn/handle/181231/7088

http://www.irgrid.ac.cn/handle/1471x/135457
Idioma(s)

中文
Fonte

Yuan QY(袁琼雁),Wang XZ(王向朝),Qiu ZC(邱自成), Trefoil aberration measurement of lithographic projection optics based on linewidth asymmetry of the aerial image.Optik,2010,121(19):1739-1742
Palavras-Chave #光学
Tipo

期刊论文
Acesso ao item digital