The formation and evolution of vacancy-type defects in Ar-implanted silicon studied by slow-positron annihilation spectroscopy
Data(s) |
2009
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Identificador | |
Idioma(s) |
英语 |
Fonte |
Li BS,Zhang CH,Zhong Yurong,et al. The formation and evolution of vacancy-type defects in Ar-implanted silicon studied by slow-positron annihilation spectroscopy[J]. NIM B,2009,267(14):2395. |
Palavras-Chave | #材料科学 |
Tipo |
期刊论文 |