Study on tapered crossed subwavelength gratings by Fourier modal method


Autoria(s): Chen X (Chen Xi); Zhong YA (Zhong Yuan); Wang Q (Wang Qing); Zhang YJ (Zhang Ye-Jin); Chen LH (Chen Liang-Hui)
Data(s)

2010

Resumo

Fourier modal method incorporating staircase approximation is used to study tapered crossed subwavelength gratings in this paper. Three intuitive formulations of eigenvalue functions originating from the prototype are presented, and their convergences are compared through numerical calculation. One of them is found to be suitable in modeling the diffraction efficiency of the circular tapered crossed subwavelength gratings without high absorption, and staircase approximation is further proven valid for non-highly-absorption tapered gratings. This approach is used to simulate the "moth-eye" antireflection surface on silicon, and the numerical result agrees well with the experimental one.

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Project supported by the National Natural Science Foundation of China (Grant No. 60636030)

国内

Project supported by the National Natural Science Foundation of China (Grant No. 60636030)

Identificador

http://ir.semi.ac.cn/handle/172111/13908

http://www.irgrid.ac.cn/handle/1471x/105276

Idioma(s)

英语

Fonte

Chen X (Chen Xi), Zhong YA (Zhong Yuan), Wang Q (Wang Qing), Zhang YJ (Zhang Ye-Jin), Chen LH (Chen Liang-Hui).Study on tapered crossed subwavelength gratings by Fourier modal method.CHINESE PHYSICS B,2010,19(10):Art. No. 104101

Palavras-Chave #光电子学 #tapered crossed subwavelength gratings #Fourier modal method #staircase approximation #eigenvalue functions #SURFACE-RELIEF GRATINGS #COUPLED-WAVE ANALYSIS #FORMULATION #DIFFRACTION #IMPLEMENTATION #CONVERGENCE
Tipo

期刊论文