Ultrasensitive Detection of Infrared Photon Using Microcantilever: Theoretical Analysis

We present a new method for detecting near-infrared, mid-infrared, and far-infrared photons with an ultra-high sensitivity. The infrared photon detection was carried out by monitoring the displacement change of a vibrating microcantilever under light pressure using a laser Doppler vibrometer. Ultrathin silicon cantilevers with high sensitivity were produced using micro/nano-fabrication technology. The photon detection system was set up. The response of the microcantilever to the photon illumination is theoretically estimated, and a nanowatt resolution for the infrared photon detection is expected at room temperature with this method.

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Made available in DSpace on 2010-11-02T02:02:35Z (GMT). No. of bitstreams: 1 Ultrasensitive Detection of Infrared Photon Using Microcantilever：Theoretical Analysis.pdf: 495323 bytes, checksum: 74aca2b40ea74c7a3ccd3b744d02279c (MD5) Previous issue date: 2010

Supported by the National Basic Research Program of China under Grant No 2006CB921107.

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Supported by the National Basic Research Program of China under Grant No 2006CB921107.