Anisotropic strain in (100) ZnSe epilayers grown on lattice mismatched substrates


Autoria(s): Yang Z; Sou IK; Chen YH
Data(s)

2000

Resumo

We show that part of the reflectance difference resonance near the E-0 energy of ZnSe is due to the anisotropic in-plane strain in the ZnSe thin films, as films grown on three distinctly different substrates, GaAs, GaP, and ZnS, all show the resonance at the same energy. Such anisotropic strain induced resonance is predicted and also observed near the E-1/E-1+Delta(1) energies in ZnSe grown on GaAs. The theory also predicts that there should be no resonance due to strain at, the E-0+Delta(0) energy, which is consistent with experiments. The strain anisotropy is rather independent of the ZnSe layer thickness, or whether the film is strain relaxed. For ZnSe films with large lattice mismatch with substrates, the resonance at the E-1/E-1+Delta(1) energies is absent, very likely due to the poor crystalline quality of the 20 nm or so surface layer. (C) 2000 American Vacuum Society. [S0734-211X(00)05604-3].

We show that part of the reflectance difference resonance near the E-0 energy of ZnSe is due to the anisotropic in-plane strain in the ZnSe thin films, as films grown on three distinctly different substrates, GaAs, GaP, and ZnS, all show the resonance at the same energy. Such anisotropic strain induced resonance is predicted and also observed near the E-1/E-1+Delta(1) energies in ZnSe grown on GaAs. The theory also predicts that there should be no resonance due to strain at, the E-0+Delta(0) energy, which is consistent with experiments. The strain anisotropy is rather independent of the ZnSe layer thickness, or whether the film is strain relaxed. For ZnSe films with large lattice mismatch with substrates, the resonance at the E-1/E-1+Delta(1) energies is absent, very likely due to the poor crystalline quality of the 20 nm or so surface layer. (C) 2000 American Vacuum Society. [S0734-211X(00)05604-3].

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Amer Vacuum Soc.; USA, Off Res.; USN, Off Res.

Hong Kong Univ Sci & Technol, Adv Mat Res Inst, Kowloon, Hong Kong, Peoples R China; Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, Beijing 100083, Peoples R China; Hong Kong Univ Sci & Technol, Dept Phys, Kowloon, Hong Kong, Peoples R China

Amer Vacuum Soc.; USA, Off Res.; USN, Off Res.

Identificador

http://ir.semi.ac.cn/handle/172111/14965

http://www.irgrid.ac.cn/handle/1471x/105200

Idioma(s)

英语

Publicador

AMER INST PHYSICS

2 HUNTINGTON QUADRANGLE, STE 1NO1, MELVILLE, NY 11747-4501 USA

Fonte

Yang Z; Sou IK; Chen YH .Anisotropic strain in (100) ZnSe epilayers grown on lattice mismatched substrates .见:AMER INST PHYSICS .JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 18 (4),2 HUNTINGTON QUADRANGLE, STE 1NO1, MELVILLE, NY 11747-4501 USA ,2000,2271-2273

Palavras-Chave #半导体物理 #REFLECTANCE DIFFERENCE SPECTROSCOPY #ZNSE/GAAS INTERFACE #STATES #GAAS
Tipo

会议论文