Integrated multimode interference couplers in silicon-on insulator
| Data(s) |
2000
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|---|---|
| Resumo |
Silicon-on insulator (SOI) is an attractive platform for the fabrication of optoelectronic integrated circuit. Thin cladding layers (< 1.0<mu>m) can be used in SOI waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. Here we demonstrate the fabrication of 1 x 4 and 2 x 2 multimode interference (MMI) coupler based on SOI technology. Performances of the devices are analyzed. The minimum excess loss of the devices is about 1.8dB. The devices show uniform power distribution. Silicon-on insulator (SOI) is an attractive platform for the fabrication of optoelectronic integrated circuit. Thin cladding layers (< 1.0<mu>m) can be used in SOI waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. Here we demonstrate the fabrication of 1 x 4 and 2 x 2 multimode interference (MMI) coupler based on SOI technology. Performances of the devices are analyzed. The minimum excess loss of the devices is about 1.8dB. The devices show uniform power distribution. 于2010-10-29批量导入 Made available in DSpace on 2010-10-29T06:36:53Z (GMT). No. of bitstreams: 1 2892.pdf: 121333 bytes, checksum: 6e4e8babd7aa49dc4fc0f9274a535651 (MD5) Previous issue date: 2000 China Opt & Optoelectr Manufacturers Assoc.; Chinese Phys Soc.; SPIE. Chinese Acad Sci, Inst Semicond, State Key Lab INtegrated Optoelect, Beijing 100083, Peoples R China China Opt & Optoelectr Manufacturers Assoc.; Chinese Phys Soc.; SPIE. |
| Identificador | |
| Idioma(s) |
英语 |
| Publicador |
SPIE-INT SOC OPTICAL ENGINEERING 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA |
| Fonte |
Wei HZ; Yu YZ; Zhang XF; Liu ZL; Ma HZ; Li GH; Shi W; Fang CS .Integrated multimode interference couplers in silicon-on insulator .见：SPIE-INT SOC OPTICAL ENGINEERING .OPTICAL INTERCONNECTS FOR TELECOMMUNICATION AND DATA COMMUNICATIONS, 4225,1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA ,2000,124-127 |
| Palavras-Chave | #半导体器件 #SOI #multimode interference #optical waveguide device #integrated optics #POWER SPLITTERS |
| Tipo |
会议论文 |
