Stress analysis of silica-based arrayed waveguide grating by a finite element method

The stress distribution in silica optical waveguides on silicon is calculated by using finite element method (FEM). The waveguides are mainly subjected to compressive stress along the x direction and the z direction, and it is accumulated near the interfaces between the core and cladding layers. The shift of central wavelength of silica arrayed waveguide grating (AWG) on silicon-substrate with the designed wavelength and the polarization dependence are caused by the stress in the silica waveguides.

The stress distribution in silica optical waveguides on silicon is calculated by using finite element method (FEM). The waveguides are mainly subjected to compressive stress along the x direction and the z direction, and it is accumulated near the interfaces between the core and cladding layers. The shift of central wavelength of silica arrayed waveguide grating (AWG) on silicon-substrate with the designed wavelength and the polarization dependence are caused by the stress in the silica waveguides.

于2010-10-29批量导入

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SPIE.; Chinese Opt Soc.; Shanghai Jiaotong Univ.; Beijing Inst Technol.; Australian Opt Soc.; Opt Soc Korea.; Opt Soc Japan, Japan Soc Appl Phys.; Opt Soc India.; Optoelect Ind & Technol Dev Assoc.; Optoelect Ind Dev Assoc.; KAPID.; Assoc Photon Ind Dev.; Phonton Ind & Dev Assoc.; Chinese Soc Astronaut.; SPIE Asia-Pacific Chapter.

Chinese Acad Sci, Inst Semicond, R&D Ctr Optoelect, Beijing 100083, Peoples R China

SPIE.; Chinese Opt Soc.; Shanghai Jiaotong Univ.; Beijing Inst Technol.; Australian Opt Soc.; Opt Soc Korea.; Opt Soc Japan, Japan Soc Appl Phys.; Opt Soc India.; Optoelect Ind & Technol Dev Assoc.; Optoelect Ind Dev Assoc.; KAPID.; Assoc Photon Ind Dev.; Phonton Ind & Dev Assoc.; Chinese Soc Astronaut.; SPIE Asia-Pacific Chapter.