Light induced rapid thermal diffusion of boron atom in silicon
| Data(s) |
1992
|
|---|---|
| Resumo |
国家自然科学基金 |
| Identificador | |
| Idioma(s) |
英语 |
| Fonte |
Shi Wanquan;Hou Qingrun;Liu Xuejun;Liu Shixiang;Fu Zhengqing;Lu Liwn;Li Yuanjing.Light induced rapid thermal diffusion of boron atom in silicon,Chinese Physics Letters,1992,9(9):375 |
| Palavras-Chave | #半导体材料 |
| Tipo |
期刊论文 |
