氯对硅中4d过渡杂质的钝化
| Data(s) |
1994
|
|---|---|
| Resumo |
于2010-11-23批量导入 zhangdi于2010-11-23 13:14:40导入数据到SEMI-IR的IR Made available in DSpace on 2010-11-23T05:14:40Z (GMT). No. of bitstreams: 1 6080.pdf: 109812 bytes, checksum: 5662cfe30f38ab0a22fc4cd9700aef35 (MD5) Previous issue date: 1994 中科院半导体所 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
周洁;王永康;孙景兰;卢励吾;吴汲安.氯对硅中4d过渡杂质的钝化,电子学报,1994,22(5):80 |
| Palavras-Chave | #半导体化学 |
| Tipo |
期刊论文 |
