Application of Wet Chemical Etching in Fabrication Process of GaAs/AlGaAs Quantum Dot Arrays


Autoria(s): 王杏华; 宋爱民; 程文超; 李国华; 李承芳; 李月霞; 谭平恒
Data(s)

2000

Resumo

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中科院半导体所

Identificador

http://ir.semi.ac.cn/handle/172111/18843

http://www.irgrid.ac.cn/handle/1471x/104059

Idioma(s)

英语

Fonte

王杏华;宋爱民;程文超;李国华;李承芳;李月霞;谭平恒.Application of Wet Chemical Etching in Fabrication Process of GaAs/AlGaAs Quantum Dot Arrays,半导体学报,2000,21(1):22

Palavras-Chave #半导体化学
Tipo

期刊论文