砷化镓晶片表面损伤层分析
| Data(s) |
1999
|
|---|---|
| Resumo |
于2010-11-23批量导入 zhangdi于2010-11-23 13:08:38导入数据到SEMI-IR的IR Made available in DSpace on 2010-11-23T05:08:38Z (GMT). No. of bitstreams: 1 5129.pdf: 257338 bytes, checksum: 46ba2eb0c3c8aad0dbce798512bcbd7f (MD5) Previous issue date: 1999 中科院半导体所 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
郑红军;卜俊鹏;曹福年;白玉柯;吴让元;惠峰;何宏家.砷化镓晶片表面损伤层分析,稀有金属,1999,23(4):241 |
| Palavras-Chave | #半导体材料 |
| Tipo |
期刊论文 |
