1.55μm Fabry-Perot Thermo-Optical Tunable Filter with amorphous-Si as Cavity
Data(s) |
2003
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Resumo |
A 1.55μm Fabry-Perot (F-P) thermo-optical tunable filter is fabricated. The cavity is made of amorphous silicon (a-Si) layer grown by electron-beam evaporation technique. Due to the excellent thermo-optical property of a-Si, the refractive index of the F-P cavity will be changed by heating; the transmittance resonant peak will therefore shift substantially. The measured tuning range is 12nm, FWHM (full-width-at-half-maximum) of the transmission peak is 9nm, and heating efficiency is 0.1K/mW. The large FWHM is mainly due to the non-ideal coating deposition and mirror undulation. Possible improvements to increase the efficiency of heating are suggested. National natural Science Foundation of China (No. 961 4 3),National high Technology research and Development Program of China (No. 2 2AA312 1 ),Project supported by State Key Development Program for Basic Research of China (No. G2 366 3) |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Zuo Yuhua;Cai Xiao;Mao Rongwei;Huang Changjun;Cheng Buwen;Li Chuanbo;Luo Liping;Gao Junhua;Bai Yunxia;Jiang Lei;Ma Chaohua;Wang Liangchen;Yu Jinzhong;Wang Qiming.1.55μm Fabry-Perot Thermo-Optical Tunable Filter with amorphous-Si as Cavity,半导体学报,2003,24(9):911-915 |
Palavras-Chave | #光电子学 |
Tipo |
期刊论文 |