Design and Fabrication of Ultracompact 3-dB MMI Coupler in Silicon-on-Insulator
| Data(s) |
2003
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| Resumo |
An ultracompact 3-dB coupler is designed and fabricated in silicon-on-insulator,based on 12 line tapered multimode interference(MMI) coupler.Comparing with the conventional straigth MMI coupler,the device is-40% shorter in length.The device exhibits uniformity of 1.3dB and excess loss of 2.5dB An ultracompact 3-dB coupler is designed and fabricated in silicon-on-insulator,based on 12 line tapered multimode interference(MMI) coupler.Comparing with the conventional straigth MMI coupler,the device is-40% shorter in length.The device exhibits uniformity of 1.3dB and excess loss of 2.5dB 于2010-11-23批量导入 zhangdi于2010-11-23 13:06:53导入数据到SEMI-IR的IR Made available in DSpace on 2010-11-23T05:06:53Z (GMT). No. of bitstreams: 1 4848.pdf: 278452 bytes, checksum: e53ec7008246651101f19ea3afb6281b (MD5) Previous issue date: 2003 国家自然科学基金（批准号：6999 54 ，6989626 ）,国家重点基础研究发展规划（编号：G2 366）资助项目 Institute of Semiconductors,The Chinses Academy of Sicences;Microelectronics R&D Center,Institute of Semiconductors,The Chinese Academy of Sciences 国家自然科学基金（批准号：6999 54 ，6989626 ）,国家重点基础研究发展规划（编号：G2 366）资助项目 |
| Identificador | |
| Idioma(s) |
英语 |
| Fonte |
Yan Qingfeng;Yu Jinahong;Liu Zhongli.Design and Fabrication of Ultracompact 3-dB MMI Coupler in Silicon-on-Insulator,半导体学报,2003,24(2):133-136 |
| Palavras-Chave | #微电子学 |
| Tipo |
期刊论文 |
